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Porous silicon microspheres: synthesis, characterization and application to photonic microcavities - Notes

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Journal of Materials Chemistry · Journal article · 14 May 2010

R. Fenollosa, F. Ramiro-Manzano, M. Tymczenko and F. Meseguer

Journal of Materials Chemistry

Volume 20

Pages 5210-5214

2010

Published abstract

Porous silicon microspheres have been synthesized by chemical vapour deposition of disilane gas. Their spectral signatures are similar to those of electrochemically grown porous silicon, in particular they yield photoluminescence and they show an oxidation behaviour upon their exposure to the open air. The particles are highly spherical and poly-disperse in size with diameters of approximately 0.5 to 5 micrometres, and they have a very smooth surface. Because of these reasons they work as optical microcavities with well defined resonating Mie modes. These modes have been identified in the near-infrared range. They blue-shift considerably whenever the microspheres are in contact with air because of the aforementioned oxidation process.

Figures

Figure 1. Optical microscopy and SEM images of porous silicon microspheres
Figure 1. Summary. The optical micrographs compare silicon particles obtained at different disilane decomposition times. Shorter growth produces porous microspheres that scatter yellow, orange and red light, whereas the longer-grown hydrogenated amorphous silicon spheres appear black because silicon absorbs visible light. The close view of an individual particle and the electron micrograph confirm the micrometre-scale spherical morphology needed for the particles to operate as optical microcavities.

From R. Fenollosa et al., J. Mater. Chem. 20, 5210-5214 (2010), DOI 10.1039/C0JM00079E. © The Royal Society of Chemistry 2010. Reproduced by an author with acknowledgement.

Absorbance and photoluminescence spectra of porous silicon microspheres
Figure 2. Summary. Spectral signatures of porous silicon microspheres. (a) Mid-infrared optical absorbance spectra after exposure to open air for several minutes, 2 h and 120 h.

From R. Fenollosa et al., J. Mater. Chem. 20, 5210-5214 (2010), DOI 10.1039/C0JM00079E. © The Royal Society of Chemistry 2010. Reproduced by an author with acknowledgement.

Figure 3. TEM and HRTEM images of crushed porous silicon microspheres
Figure 3. Summary. (a) TEM and (b) HRTEM images of crushed porous silicon microspheres. White boundaries surrounding darker areas of about 10 nm correspond to pores.

From R. Fenollosa et al., J. Mater. Chem. 20, 5210-5214 (2010), DOI 10.1039/C0JM00079E. © The Royal Society of Chemistry 2010. Reproduced by an author with acknowledgement.

Figure 4. Optical transmittance spectra and oxidation-induced resonance shift
Figure 4. Summary. (a) Optical transmittance spectra illustrating the blue shift of resonating modes after exposure to open air. (b) Experimental mode position versus exposure time for the mode marked by the grey strip in (a); the inset shows the derivative of the experimental data.

From R. Fenollosa et al., J. Mater. Chem. 20, 5210-5214 (2010), DOI 10.1039/C0JM00079E. © The Royal Society of Chemistry 2010. Reproduced by an author with acknowledgement.

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Article access and reuse

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Research fields

Bottom-up

Controlled disilane decomposition forms micrometre-scale porous silicon spheres with smooth surfaces and intrinsic photoluminescence. Processing time and subsequent oxidation tune porosity and composition while the spherical boundary supplies cavity confinement.

Simulations & fits

Mie-mode analysis assigns the resonances in single-particle transmission and relates their spectral displacement to effective refractive-index changes. This turns oxidation-induced blue shifts into a sensitive probe of the evolving porous sphere.

Characterization

Optical and electron microscopy, mid-infrared absorption, transmission and photoluminescence characterize morphology, silicon-hydride chemistry and cavity response. Correlating these measurements shows how an emitting porous material and a resonator coexist in one particle.