Research · Publication & note
A fully integrated high-Q Whispering-Gallery Wedge Resonator
Abstract
Microresonator devices which possess ultra-high quality factors are essential for fundamental investigations and applications. Microsphere and microtoroid resonators support remarkably high Q values at optical frequencies, while planarity constraints preclude their integration into functional lightwave circuits. Conventional semiconductor processing can also be used to realize ultra-high-Q planar wedge resonators, but their full integration with side-coupled dielectric waveguides remains an issue. Here we show the full monolithic integration of a wedge-resonator and vertically coupled waveguide system on a silicon chip. Because the cavity and waveguide lie in different planes, the shallow-angle wedge can be realized while the waveguide remains intact, allowing arbitrary coupling strength to be engineered. Precise size control and robustness against post-processing make this system a promising platform for industrial-scale integration of ultra-high-Q devices into planar lightwave chips.
How to cite
Initials first
F. Ramiro-Manzano, N. Prtljaga, L. Pavesi, G. Pucker and M. Ghulinyan. “A fully integrated high-Q Whispering-Gallery Wedge Resonator.” Opt. Express 20(20), 22934–22942 (2012). DOI: 10.1364/OE.20.022934.
Family name first
Ramiro-Manzano, F., Prtljaga, N., Pavesi, L., Pucker, G. and Ghulinyan, M. “A fully integrated high-Q Whispering-Gallery Wedge Resonator.” Opt. Express 20(20), 22934–22942 (2012). DOI: 10.1364/OE.20.022934.
Article access and reuse
© 2012 Optical Society of America. The article was published in Optics Express. The figures shown on this author’s personal website are accompanied by the complete bibliographic attribution; reuse remains governed by the article’s access terms and Optica Publishing Group copyright policy.
Figures
Figure 1. Evanescent-field coupling schemes in integrated photonics.
Figure 2. Fully integrated wedge and conventional microdisk resonators with vertical coupling to bus waveguides on a silicon chip.
Figure 3. Process flow used to fabricate vertically coupled wedge-resonator and waveguide systems.
Figure 4. Optical characterisation of wedge resonators, including transmission spectra and resonance analysis.
Figure 5. Numerical analysis of the resonator field intensity.
Figures reproduced from F. Ramiro-Manzano et al., Optics Express 20, 22934–22942 (2012), DOI: 10.1364/OE.20.022934. © 2012 Optical Society of America. This open-access article is reused for non-commercial purposes with attribution and a working link to the published article, in accordance with the Optica Publishing Group author and end-user reuse policy.